- 专利标题: Forming semiconductor-superconductor hybrid devices with a horizontally-confined channel
-
申请号: US17532908申请日: 2021-11-22
-
公开(公告)号: US11849639B2公开(公告)日: 2023-12-19
- 发明人: Geoffrey Charles Gardner , Sergei Vyatcheslavovich Gronin , Flavio Griggio , Raymond Leonard Kallaher , Noah Seth Clay , Michael James Manfra
- 申请人: Microsoft Technology Licensing, LLC
- 申请人地址: US WA Redmond
- 专利权人: Microsoft Technology Licensing, LLC
- 当前专利权人: Microsoft Technology Licensing, LLC
- 当前专利权人地址: US WA Redmond
- 代理机构: Singh Law, PLLC
- 代理商 Ranjeev Singh
- 主分类号: H10N60/10
- IPC分类号: H10N60/10 ; H10N60/01
摘要:
Methods of forming semiconductor-superconductor hybrid devices with a horizontally-confined channel are described. An example method includes forming a first isolated semiconductor heterostructure and a second isolated semiconductor heterostructure. The method further includes forming a left gate adjacent to a first side of each of the first isolated semiconductor heterostructure and the second isolated semiconductor heterostructure. The method further includes forming a right gate adjacent to a second side, opposite to the first side, of each of the first isolated semiconductor heterostructure and the second isolated semiconductor heterostructure, where a top surface of each of the left gate and the right gate is offset vertically from a selected surface of each of the first isolated semiconductor heterostructure and the second isolated semiconductor heterostructure by a predetermined offset amount. The method further includes forming a superconducting layer over each of the first isolated semiconductor heterostructure and the second isolated semiconductor heterostructure.
公开/授权文献
信息查询