Invention Grant
- Patent Title: Wrap-around contact structures for semiconductor nanowires and nanoribbons
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Application No.: US17984170Application Date: 2022-11-09
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Publication No.: US11824107B2Publication Date: 2023-11-21
- Inventor: Rishabh Mehandru , Tahir Ghani , Stephen Cea , Biswajeet Guha
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/775
- IPC: H01L29/775 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/786

Abstract:
Wrap-around contact structures for semiconductor nanowires and nanoribbons, and methods of fabricating wrap-around contact structures for semiconductor nanowires and nanoribbons, are described. In an example, an integrated circuit structure includes a semiconductor nanowire above a first portion of a semiconductor sub-fin. A gate structure surrounds a channel portion of the semiconductor nanowire. A source or drain region is at a first side of the gate structure, the source or drain region including an epitaxial structure on a second portion of the semiconductor sub-fin, the epitaxial structure having substantially vertical sidewalls in alignment with the second portion of the semiconductor sub-fin. A conductive contact structure is along sidewalls of the second portion of the semiconductor sub-fin and along the substantially vertical sidewalls of the epitaxial structure.
Public/Granted literature
- US20230068314A1 WRAP-AROUND CONTACT STRUCTURES FOR SEMICONDUCTOR NANOWIRES AND NANORIBBONS Public/Granted day:2023-03-02
Information query
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