- 专利标题: Field facet system, optical arrangement and lithography apparatus
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申请号: US17553040申请日: 2021-12-16
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公开(公告)号: US11815817B2公开(公告)日: 2023-11-14
- 发明人: Guenter Rudolph , Joram Rosseels
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE 2019208980.1 2019.06.19
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/00 ; G02B5/09 ; G02B26/08
摘要:
A field facet system for a lithography apparatus includes an optical element. The optical element includes a base section having an optically effective surface. The optical element also includes a plurality of lever sections provided at a rear side of the base section facing away from the optically effective surface. In addition, the field facet system includes two or more actuating elements configured, with the aid of the lever sections acting as levers, to apply in each case a bending moment to the base section to elastically deform the base section and thus to alter a radius of curvature of the optically effective surface. The actuating elements are arranged in series as viewed along a length direction of the optical element.
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