- 专利标题: Three-dimensional memory device with deposited semiconductor plugs and methods for forming the same
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申请号: US16455626申请日: 2019-06-27
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公开(公告)号: US11758722B2公开(公告)日: 2023-09-12
- 发明人: Li Hong Xiao
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 申请人地址: CN Wuhan
- 专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人地址: CN Wuhan
- 代理机构: BAYES PLLC
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H10B41/10 ; H10B41/27 ; H10B41/35 ; H10B43/10 ; H10B43/35
摘要:
Embodiments of 3D memory devices and the fabrication methods to form the 3D memory devices are provided. A 3D memory device includes a substrate, a memory deck, and a memory string. The memory deck includes a plurality of interleaved conductor layers and dielectric layers on the substrate. The memory string extends vertically through the memory deck. A bottom conductor layer of the plurality of interleaved conductor layers and dielectric layers can intersect with and contact the memory string.
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