- 专利标题: Topological semi-metal interconnects
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申请号: US16950453申请日: 2020-11-17
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公开(公告)号: US11749602B2公开(公告)日: 2023-09-05
- 发明人: Ching-Tzu Chen , Nicholas Anthony Lanzillo , Vijay Narayanan , Takeshi Nogami
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Robert J. Shatto
- 主分类号: H01L23/532
- IPC分类号: H01L23/532 ; H01L23/522 ; H01L21/3213 ; H01L21/768 ; H01L23/528
摘要:
Provided is a method for fabricating an interconnect. The method comprises forming a topological semi-metal layer. The method further comprises patterning the topological semi-metal layer to form one or more interconnects. The method further comprises forming a dielectric layer between the one or more interconnects. The method further comprises forming a hermetic dielectric cap layer on top of the one or more interconnects and the dielectric layer.
公开/授权文献
- US20220157733A1 TOPOLOGICAL SEMI-METAL INTERCONNECTS 公开/授权日:2022-05-19
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