- 专利标题: Selective micro device transfer to receiver substrate
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申请号: US17569918申请日: 2022-01-06
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公开(公告)号: US11735547B2公开(公告)日: 2023-08-22
- 发明人: Gholamreza Chaji , Ehsanollah Fathi
- 申请人: VueReal Inc.
- 申请人地址: CA Waterloo
- 专利权人: VueReal Inc.
- 当前专利权人: VueReal Inc.
- 当前专利权人地址: CA Waterloo
- 代理机构: Nixon Peabody LLP
- 优先权: CA 2879465 2015.01.23 CA 2879627 2015.01.23 CA 2880718 2015.01.28 CA 2883914 2015.03.04 CA 2890398 2015.05.04 CA 2887186 2015.05.12 CA 2891007 2015.05.12 CA 2891027 2015.05.12
- 分案原申请号: US17365634 2021.07.01
- 主分类号: H01L21/687
- IPC分类号: H01L21/687 ; H01L23/00 ; H01L25/00 ; G01R31/26 ; H01L21/683 ; H01L21/66 ; H05K13/04
摘要:
A method of selectively transferring micro devices from a donor substrate to contact pads on a receiver substrate. Micro devices being attached to a donor substrate with a donor force. The donor substrate and receiver substrate are aligned and brought together so that selected micro devices meet corresponding contact pads. A receiver force is generated to hold selected micro devices to the contact pads on the receiver substrate. The donor force is weakened and the substrates are moved apart leaving selected micro devices on the receiver substrate. Several methods of generating the receiver force are disclosed, including adhesive, mechanical and electrostatic techniques.
公开/授权文献
- US20220130783A1 SELECTIVE MICRO DEVICE TRANSFER TO RECEIVER SUBSTRATE 公开/授权日:2022-04-28
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