发明授权
- 专利标题: Plating apparatus
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申请号: US17504127申请日: 2021-10-18
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公开(公告)号: US11725297B2公开(公告)日: 2023-08-15
- 发明人: Naoki Shimomura , Mizuki Nagai
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: BakerHostetler
- 优先权: JP 20175956 2020.10.20
- 主分类号: C25D17/00
- IPC分类号: C25D17/00 ; C25D17/10 ; C25D17/02
摘要:
A plating apparatus including a thief electrode that can be suitably maintained is provided. The plating apparatus includes a substrate holder holding a substrate, a thief electrode supporter supporting a thief electrode to be disposed outside the substrate, a plating tank configured to immerse the substrate in a plating solution for applying an electroplating treatment, a thief electrode maintenance tank configured to perform maintenance of the thief electrode, and a transport module configured to transport the thief electrode supporter to the plating tank and the thief electrode maintenance tank.
公开/授权文献
- US20220119981A1 PLATING APPARATUS 公开/授权日:2022-04-21
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