- 专利标题: Quantum device and method of manufacturing the same
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申请号: US17349281申请日: 2021-06-16
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公开(公告)号: US11696517B2公开(公告)日: 2023-07-04
- 发明人: Kenji Nanba , Ayami Yamaguchi , Akira Miyata , Katsumi Kikuchi , Suguru Watanabe , Takanori Nishi , Hideyuki Satou
- 申请人: NEC Corporation
- 申请人地址: JP Tokyo
- 专利权人: NEC CORPORATION
- 当前专利权人: NEC CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP 20106152 2020.06.19
- 主分类号: G06N10/00
- IPC分类号: G06N10/00 ; H10N60/81 ; H10N60/01
摘要:
A quantum device (100) includes: an interposer (112); a quantum chip (111); and a connection part (130) that is provided between the interposer (112) and the quantum chip (111) and electrically connects a wiring layer of the interposer (112) to a wiring layer of the quantum chip (111), in which the connection part (130) includes: a plurality of pillars (131) arranged on a main surface of the interposer (112); and a metal film (132) provided on a surface of the plurality of pillars (131) in such a way that it contacts the wiring layer of the quantum chip (111) and the thickness of the metal film at outer peripheral parts of the tip of each of the plurality of pillars (131) becomes larger than the thickness of the metal film at a center part of the tip of each of the plurality of pillars (131).
公开/授权文献
- US20210399194A1 QUANTUM DEVICE AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2021-12-23
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