- 专利标题： Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and method for producing piezoelectric device
-
申请号： US17389595申请日： 2021-07-30
-
公开(公告)号： US11673392B2公开(公告)日： 2023-06-13
- 发明人: Yasuhiro Itayama
- 申请人： Seiko Epson Corporation
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP 2020130137 2020.07.31
- 主分类号： B41J2/16
- IPC分类号： B41J2/16 ; H01L41/047 ; B41J2/14
摘要：
A piezoelectric device includes a diaphragm, a piezoelectric actuator, and an orientation layer between the diaphragm and the piezoelectric layer. The piezoelectric actuator has a first electrode, a piezoelectric layer, and a second electrode, with the first electrode, a piezoelectric layer, and a second electrode on the diaphragm. The orientation layer is a stack of two or more tiers.
公开/授权文献
信息查询
IPC分类:
