Invention Grant
- Patent Title: Laser crystallizing apparatus
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Application No.: US16842272Application Date: 2020-04-07
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Publication No.: US11666989B2Publication Date: 2023-06-06
- Inventor: Hong Ro Lee , Chung Hwan Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20150121077 2015.08.27
- The original application number of the division: US15131226 2016.04.18
- Main IPC: B23K26/12
- IPC: B23K26/12 ; B23K26/352

Abstract:
Provided is a laser crystallizing apparatus including a laser generator generating a laser beam and an optical system photo-converting the laser beam to make a converted laser beam. A beam transmitting unit includes a passage through which the converted laser beam is transmitted into the chamber. The beam transmitting unit includes a chamber window provided on the chamber to transmit the laser beam, and a shield window movably disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window.
Public/Granted literature
- US20200230741A1 LASER CRYSTALLIZING APPARATUS Public/Granted day:2020-07-23
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