- 专利标题： Substrate support assembly and substrate processing device including the same
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申请号： US16922741申请日： 2020-07-07
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公开(公告)号： US11664267B2公开(公告)日： 2023-05-30
- 发明人: JaeMin Roh , Julll Lee , GunYong Park
- 申请人： ASM IP Holding B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 代理机构： Snell & Wilmer L.L.P.
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; H01L21/687 ; H01L21/67
摘要：
A substrate support assembly arranged in a chamber includes: a support plate including a first surface on which a substrate is seated; a driver configured to tilt the support plate such that the first surface is inclined with respect to a reference surface by a lower inclination angle; and a controller configured to control the driver such that the lower inclination angle is adjusted based on an upper inclination angle formed by the inclination of the gas supplier coupled to the upper surface of the chamber with respect to the reference surface.
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