- 专利标题: Torsional mode quartz crystal device
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申请号: US17305904申请日: 2021-07-16
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公开(公告)号: US11658637B2公开(公告)日: 2023-05-23
- 发明人: Yue Fang , Jian Feng Chen
- 申请人: Statek Corporation
- 申请人地址: US CA Orange
- 专利权人: Statek Corporation
- 当前专利权人: Statek Corporation
- 当前专利权人地址: US CA Orange
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 主分类号: H03H9/215
- IPC分类号: H03H9/215 ; H03H9/05 ; H03H9/13 ; H03H9/02 ; G01K7/32 ; H03H9/10
摘要:
The disclosed technology generally relates to quartz crystal devices and more particularly to quartz crystal devices configured to vibrate in torsional mode. In one aspect, a quartz crystal device configured for temperature sensing comprises a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal, wherein each of the tines has formed on one or both of opposing sides thereof a pair of vertically recessed groove structures laterally elongated in the horizontal lengthwise direction, wherein the pair of groove structures are separated in a horizontal widthwise direction by a line structure. The quartz crystal device further comprises a first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a respective axis extending in the horizontal lengthwise direction.
公开/授权文献
- US20220109425A1 TORSIONAL MODE QUARTZ CRYSTAL DEVICE 公开/授权日:2022-04-07
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