- 专利标题: Method of producing microrods for electron emitters, and associated microrods and electron emitters
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申请号: US17846498申请日: 2022-06-22
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公开(公告)号: US11651924B1公开(公告)日: 2023-05-16
- 发明人: Kun Liu , Chad Rue , Alan Stephen Bahm
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Klarquist Sparkman, LLP
- 主分类号: H01J37/073
- IPC分类号: H01J37/073 ; H01J1/304 ; H01J1/34 ; H01J19/24
摘要:
Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate, and milling the second plate to produce one or more microrods. In another example, a microrod for an electron emitter comprises a microrod tip region that comprises a nanoneedle that in turn comprises a nanorod and a nanoprotrusion tip. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.
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