- 专利标题: Gallium arsenide single crystal and preparation method thereof
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申请号: US17841243申请日: 2022-06-15
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公开(公告)号: US11624129B1公开(公告)日: 2023-04-11
- 发明人: Youjun Gao
- 申请人: Shanxi China Crystal Technologies Co., Ltd.
- 申请人地址: CN Shanxi
- 专利权人: Shanxi China Crystal Technologies Co., Ltd.
- 当前专利权人: Shanxi China Crystal Technologies Co., Ltd.
- 当前专利权人地址: CN Shanxi
- 代理机构: Cooper Legal Group, LLC
- 优先权: CN202210403538.1 20220418
- 主分类号: C30B15/10
- IPC分类号: C30B15/10 ; C30B29/42 ; C30B15/14
摘要:
The present application discloses a gallium arsenide single crystal and preparation method thereof. The gallium arsenide single crystal has a carrier concentration of 1×1018-4×1018/cm3, and a migration rate of 1700-2600 cm2/v·s; at a same carrier concentration, B atom density in the gallium arsenide single crystal obtained using SixAsy compound as a dopant is at least 20% lower than that obtained using Si substance as a dopant; B content in the gallium arsenide single crystal is 5×1018/cm3 or lower. The preparation method for the gallium arsenide single crystal is that, before growth of the gallium arsenide single crystal, the SixAsy compound is distributed into a gallium arsenide polycrystal.
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