- 专利标题: MEMS device with optimized geometry for reducing the offset due to the radiometric effect
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申请号: US16736485申请日: 2020-01-07
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公开(公告)号: US11603310B2公开(公告)日: 2023-03-14
- 发明人: Francesco Rizzini , Alessandro Tocchio
- 申请人: STMICROELECTRONICS S.R.L.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed Intellectual Property Law Group LLP
- 优先权: IT102019000000190 20190108
- 主分类号: B81B7/00
- IPC分类号: B81B7/00 ; G01P15/02 ; G01P15/08 ; G01P15/125 ; G01C19/5712
摘要:
A MEMS device with teeter-totter structure includes a mobile mass having an area in a plane and a thickness in a direction perpendicular to the plane. The mobile mass is tiltable about a rotation axis extending parallel to the plane and formed by a first and by a second half-masses arranged on opposite sides of the rotation axis. The first and the second masses have a first and a second centroid, respectively, arranged at a first and a second distance b1, b2, respectively, from the rotation axis. First through openings are formed in the first half-mass and, together with the first half-mass, have a first total perimeter p1 in the plane. Second through openings are formed in the second half-mass and, together with the second half-mass, have a second total perimeter p2 in the plane, where the first and the second perimeters p1, p2 satisfy the equation: p1×b1=p2×b2.
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