- 专利标题： TF-SAW resonator with improved quality factor, RF filter and method of manufacturing a TF-SAW resonator
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申请号： US17047796申请日： 2019-03-14
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公开(公告)号： US11588464B2公开(公告)日： 2023-02-21
- 发明人: Christian Huck , Matthias Knapp
- 申请人： RF360 EUROPE GMBH
- 申请人地址： DE Munich
- 专利权人： RF360 EUROPE GMBH
- 当前专利权人： RF360 EUROPE GMBH
- 当前专利权人地址： DE Munich
- 代理机构： Patterson + Sheridan LLP
- 优先权： DE102018108961.9 20180416
- 国际申请： PCT/EP2019/056439 WO 20190314
- 国际公布： WO2019/201520 WO 20191024
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H03H3/08 ; H03H9/64 ; H03H9/145
摘要：
A TF-SAW resonator with improved quality factor is provided. The resonator has its piezoelectric material in the form of a thin film and an electrode structure arranged on the piezoelectric layer. Pitch (P) and metallization ratio (n) are chosen to maximize the quality factor (Q).
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