- 专利标题: Multi-layer protective coating
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申请号: US17653401申请日: 2022-03-03
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公开(公告)号: US11587772B2公开(公告)日: 2023-02-21
- 发明人: Jian Zong
- 申请人: Jiangsu Favored Nanotechnology Co., LTD
- 申请人地址: CN Wuxi
- 专利权人: Jiangsu Favored Nanotechnology Co., LTD
- 当前专利权人: Jiangsu Favored Nanotechnology Co., LTD
- 当前专利权人地址: CN Wuxi
- 代理机构: Perkins Coie LLP
- 优先权: CN201710360355.5 20170521,CN201710360378.6 20170521,CN201710360379.0 20170521,CN201710360380.3 20170521,CN201710360382.2 20170521,CN201710360383.7 20170521,CN201710361310.X 20170521
- 主分类号: C23C16/50
- IPC分类号: C23C16/50 ; H01J37/32 ; C23C16/52 ; C23C16/02 ; C23C16/458
摘要:
Methods and apparatus for preparing a protective coating are described. In one example aspect, an apparatus for preparing a protective coating includes a chamber, a substrate positioned within the chamber configured to hold at least a target object, an inlet pipe configured to direct a monomer vapor into the chamber, and one or more electrodes configured to perform a chemical vapor deposition process to produce a multi-layer coating. The chemical vapor deposition process comprises multiple cycles, each cycle comprising a pretreatment phase and a coating phase to produce a layer of the multi-layer coating.
公开/授权文献
- US20220189743A1 MULTI-LAYER PROTECTIVE COATING 公开/授权日:2022-06-16
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