Invention Grant
- Patent Title: Diagnostic systems and methods for deep learning models configured for semiconductor applications
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Application No.: US15694719Application Date: 2017-09-01
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Publication No.: US11580398B2Publication Date: 2023-02-14
- Inventor: Jing Zhang , Ravi Chandra Donapati , Mark Roulo , Kris Bhaskar
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06N3/08
- IPC: G06N3/08 ; G06N3/04 ; G06K9/62 ; G06V10/40 ; G06V10/44 ; G06T7/00 ; G06N3/082 ; G06N3/084

Abstract:
Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.
Public/Granted literature
- US20180107928A1 DIAGNOSTIC SYSTEMS AND METHODS FOR DEEP LEARNING MODELS CONFIGURED FOR SEMICONDUCTOR APPLICATIONS Public/Granted day:2018-04-19
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