- 专利标题: Determination of a simulated image of a specimen
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申请号: US17011949申请日: 2020-09-03
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公开(公告)号: US11562476B2公开(公告)日: 2023-01-24
- 发明人: Irad Peleg
- 申请人: Applied Materials Israel Ltd.
- 申请人地址: IL Rehovot
- 专利权人: Applied Materials Israel Ltd.
- 当前专利权人: Applied Materials Israel Ltd.
- 当前专利权人地址: IL Rehovot
- 代理机构: Lowenstein Sandler LLP
- 主分类号: G06T7/00
- IPC分类号: G06T7/00 ; G06N20/00
摘要:
There is provided a system to examine a semiconductor specimen, the system comprising a processor and memory circuitry configured to obtain a training sample comprising an image of a semiconductor specimen and a design image based on design data, train a machine learning module, wherein the training includes minimizing a function representative of a difference between a simulated image generated by the machine learning module based on a given design image, and a corrected image corresponding to a given image after correction of pixel position of the given image in accordance with a given displacement matrix, wherein the minimizing includes optimizing parameters of the machine learning module and of the given displacement matrix, wherein the trained machine learning module is usable to generate a simulated image of a specimen based on a design image of the specimen.
公开/授权文献
- US20220067918A1 DETERMINATION OF A SIMULATED IMAGE OF A SPECIMEN 公开/授权日:2022-03-03
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