Invention Grant
- Patent Title: Contamination trap
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Application No.: US17603687Application Date: 2020-03-10
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Publication No.: US11556067B2Publication Date: 2023-01-17
- Inventor: Sander Catharina Reinier Derks , Daniel Jozef Maria Direcks , Maurice Wilhelmus Leonardus Hendricus Feijts , Pieter Gerardus Mathijs Hoeijmakers , Katja Cornelia Joanna Clasina Moors , Violeta Navarro Paredes , William Peter Van Drent , Jan Steven Christiaan Westerlaken
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP19169778 20190417
- International Application: PCT/EP2020/056344 WO 20200310
- International Announcement: WO2020/212019 WO 20201022
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00

Abstract:
A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m−1K−1.
Public/Granted literature
- US20220197158A1 CONTAMINATION TRAP Public/Granted day:2022-06-23
Information query
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