发明授权
- 专利标题: Elastic wave device
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申请号: US16205268申请日: 2018-11-30
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公开(公告)号: US11533040B2公开(公告)日: 2022-12-20
- 发明人: Masayuki Morita , Hideki Iwamoto
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Nagaokakyo
- 代理机构: Keating & Bennett, LLP
- 优先权: JPJP2017-248387 20171225
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/145 ; H03H3/08 ; H03H9/25 ; H03H9/64 ; H01L41/29 ; H01L41/047
摘要:
An elastic wave device includes a piezoelectric film, a high acoustic velocity member, a low acoustic velocity film located between the piezoelectric film and the high acoustic velocity member and through which an elastic wave propagates at a lower acoustic velocity than an elastic wave that propagates through the piezoelectric film, and an interdigital transducer electrode including electrode fingers separated from each other and disposed side by side in a first direction. At least one of the electrode fingers includes a first metal layer including first and second main body portions. A recessed portion is located in a central region in the first direction of the electrode finger and is recessed in the thickness direction of the piezoelectric film. A protrusion portion protrudes from at least a portion of the first main body portion in the first direction.
公开/授权文献
- US20190199320A1 ELASTIC WAVE DEVICE 公开/授权日:2019-06-27
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