发明授权
- 专利标题: Elastic wave device
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申请号: US16202382申请日: 2018-11-28
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公开(公告)号: US11533038B2公开(公告)日: 2022-12-20
- 发明人: Daisuke Fukuda
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Nagaokakyo
- 代理机构: Keating & Bennett, LLP
- 优先权: JPJP2017-243232 20171219,JPJP2018-187860 20181003
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/10 ; H03H3/08 ; H03H9/145 ; H03H9/25 ; H03H9/64 ; H03H9/05 ; H01L41/047
摘要:
An elastic wave device includes a substrate, an IDT electrode, a spacer layer, a cover, and a protective layer. The spacer layer is provided on the substrate and surrounds the IDT electrode. The cover is provided on the spacer layer, is spaced apart from the IDT electrode, and includes a first main surface adjacent to the spacer layer and a second main surface facing the first main surface. The protective layer includes a third main surface contacting the second main surface, a fourth main surface facing the third main surface, and a side surface connected to the fourth main surface. In at least portion of the side surface of the protective layer, a portion including an intersection line between the side surface and the fourth main surface is located farther inward than an outer edge of the substrate in plan view in the thickness direction of the substrate.
公开/授权文献
- US20190190484A1 ELASTIC WAVE DEVICE 公开/授权日:2019-06-20
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