- 专利标题: Load port with non-contact sensor
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申请号: US17348816申请日: 2021-06-16
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公开(公告)号: US11532496B2公开(公告)日: 2022-12-20
- 发明人: Kinya Kagami , Seiji Matsuda
- 申请人: HIRATA CORPORATION
- 申请人地址: JP Kumamoto
- 专利权人: HIRATA CORPORATION
- 当前专利权人: HIRATA CORPORATION
- 当前专利权人地址: JP Kumamoto
- 代理机构: Buchanan Ingersoll & Rooney PC
- 优先权: JPJP2019-068531 20190329,JPJP2020-039149 20200306
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; H01L21/67 ; H01L21/687
摘要:
A load port includes a first pin projecting on a dock plate and provided on the dock plate so as to be pushed down, and a first detection unit provided on the base portion and configured to detect that the dock plate is located at a first position. The first detection unit includes a movable member capable of displacing in a moving direction of the dock plate, and a first sensor configured to detect the displacement of the movable member. The movable member is arranged at a position to abut against the first pin that is in a pushed down state in a process in which the dock plate moves from a second position to the first position.
公开/授权文献
- US20210313210A1 LOAD PORT 公开/授权日:2021-10-07
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