- 专利标题： System for coating a substrate
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申请号： US17514094申请日： 2021-10-29
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公开(公告)号： US11532494B2公开(公告)日： 2022-12-20
- 发明人: Gary Hillman , Rajnish Tiwari , Robert D. Mohondro
- 申请人： Service Support Specialties, Inc.
- 申请人地址： US NJ Montville
- 专利权人： Service Support Specialties, Inc.
- 当前专利权人： Service Support Specialties, Inc.
- 当前专利权人地址： US NJ Montville
- 代理机构： The Belles Group, P.C.
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/02 ; H01L21/205 ; G03F7/16 ; B05D1/00
摘要：
A system and/or method for coating a substrate. The system may include a chuck for holding and rotating the substrate, a dispensing subsystem for dispensing a coating material onto the substrate, and a shield member. The shield member may be movable towards and away from the substrate during the coating procedure. The shield member may have an inverted funnel shape. The shield member may include a central chamber through which a solvent vapor flows and a peripheral chamber that is fluidly separated from the central chamber through which a gas flows. During a coating procedure, the shield member may be moved very close to the substrate and the solvent vapor and gas may flow onto the substrate to create a solvent rich ambient around the substrate and prevent aerosols of the coating material from redepositing onto the substrate after being flung off due to spinning of the substrate.
公开/授权文献
- US20220148889A1 METHOD AND/OR SYSTEM FOR COATING A SUBSTRATE 公开/授权日：2022-05-12
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