Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15924307Application Date: 2018-03-19
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Publication No.: US11528008B2Publication Date: 2022-12-13
- Inventor: Katsuya Daimon , Akira Michigami , Yasuharu Nakai , Toshimaro Yoneda
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2017-073399 20170403
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/02 ; H01L41/187 ; H03H9/145 ; H01L41/047 ; H03H9/64

Abstract:
An elastic wave device includes a piezoelectric substrate, elastic wave resonators on or in the piezoelectric substrate, and a dielectric film disposed on the piezoelectric substrate and covering the elastic wave resonators. The elastic wave resonators includes respective IDT electrodes on the piezoelectric substrate. When a wavelength specified by an electrode finger pitch of the IDT electrode is denoted as λ, at least two of the elastic wave resonators have the different wavelengths. In two of the elastic wave resonators having different wavelengths, a film thickness of the IDT electrode in the elastic wave resonator having the longer wavelength is not greater than that of the IDT electrode in the elastic wave resonator having the shorter wavelength. Film thicknesses of the IDT electrodes in at least two of the elastic wave resonators are different from each other. The elastic wave device utilizes a Rayleigh wave.
Public/Granted literature
- US20180287586A1 ELASTIC WAVE DEVICE Public/Granted day:2018-10-04
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