- 专利标题： Condenser and semiconductor processing machine
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申请号： US17442676申请日： 2021-06-30
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公开(公告)号： US11519669B2公开(公告)日： 2022-12-06
- 发明人: Tianlong Li
- 申请人： CHANGXIN MEMORY TECHNOLOGIES, INC.
- 申请人地址： CN Hefei
- 专利权人： CHANGXIN MEMORY TECHNOLOGIES, INC.
- 当前专利权人： CHANGXIN MEMORY TECHNOLOGIES, INC.
- 当前专利权人地址： CN Hefei
- 代理机构： Cooper Legal Group, LLC
- 优先权： CN202011062187.X 20200930
- 国际申请： PCT/CN2021/103674 WO 20210630
- 国际公布： WO2022/068299 WO 20220407
- 主分类号： F28B1/02
- IPC分类号： F28B1/02 ; F28F13/12 ; H01L27/00 ; F28B9/10 ; F28B11/00 ; H01L21/67
摘要：
A condenser and semiconductor processing machine, relating to the art of semiconductor equipment. The condenser 100 includes a sealed cavity; wherein, a gas passage is provided in the sealed cavity; cooling liquid is filled around the gas passage; a gas inlet, a gas outlet, and a liquid outlet are provided on the sealed cavity, the gas inlet is communicated with the inlet of the gas passage, the gas outlet is communicated with the outlet of the gas passage, and the liquid outlet is communicated with the gas passage; the gas passage is a Tesla valve structure passage.
公开/授权文献
- US20220349654A1 CONDENSER AND SEMICONDUCTOR PROCESSING MACHINE 公开/授权日：2022-11-03
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