发明授权
- 专利标题: Multilevel semiconductor device and structure with image sensors and wafer bonding
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申请号: US17844687申请日: 2022-06-20
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公开(公告)号: US11488997B1公开(公告)日: 2022-11-01
- 发明人: Zvi Or-Bach , Deepak C. Sekar , Brian Cronquist
- 申请人: Monolithic 3D Inc.
- 申请人地址: US OR Klamath Falls
- 专利权人: Monolithic 3D Inc.
- 当前专利权人: Monolithic 3D Inc.
- 当前专利权人地址: US OR Klamath Falls
- 代理机构: Patent PC
- 代理商 Bao Tran
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L23/00 ; H01L23/544
摘要:
An integrated device, the device including: a first level including a first mono-crystal layer, the first mono-crystal layer including a plurality of single crystal transistors; an overlaying oxide on top of the first level; a second level including a second mono-crystal layer, the second level overlaying the oxide, where the second mono-crystal layer includes a plurality of semiconductor devices; a third level overlaying the second level, where the third level includes a plurality of image sensors, where the second level is bonded to the first level, where the bonded includes an oxide to oxide bond; and an isolation layer disposed between the second mono-crystal layer and the third level.
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