- 专利标题: Engineered substrate
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申请号: US16074348申请日: 2017-02-01
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公开(公告)号: US11430910B2公开(公告)日: 2022-08-30
- 发明人: Cécile Aulnette , Frank Dimroth , Eduard Oliva
- 申请人: Soitec
- 申请人地址: FR Bernin
- 专利权人: Soitec
- 当前专利权人: Soitec
- 当前专利权人地址: FR Bernin
- 代理机构: TraskBritt
- 优先权: FR1650861 20160203
- 国际申请: PCT/EP2017/052080 WO 20170201
- 国际公布: WO2017/134064 WO 20170810
- 主分类号: H01L31/044
- IPC分类号: H01L31/044 ; H01L31/18 ; H01L31/056 ; H01L31/02 ; H01L31/0735
摘要:
An engineered substrate comprises: a seed layer made of a first semiconductor material for growth of a solar cell; a support substrate comprising a base and a surface layer epitaxially grown on a first side of the base, the base and the surface layer made of a second semiconductor material; a direct bonding interface between the seed layer and the surface layer; wherein a doping concentration of the surface layer is higher than a predetermined value such that the electrical resistivity at the direct bonding interface is below 10 mOhm·cm2, preferably below 1 mOhm·cm2; and wherein a doping concentration of the base as well as the thickness of the engineered substrate are such that absorption of the engineered substrate is less than 20%, preferably less than 10%, and total area-normalized series resistance of the engineered substrate is less than 10 mOhm·cm2, preferably less than 1 mOhm·cm2.
公开/授权文献
- US20190355867A1 ENGINEERED SUBSTRATE 公开/授权日:2019-11-21
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