- 专利标题: Semiconductor device and equipment
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申请号: US16929424申请日: 2020-07-15
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公开(公告)号: US11417694B2公开(公告)日: 2022-08-16
- 发明人: Tomoyuki Tezuka
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Venable LLP
- 优先权: JPJP2019-137650 20190726
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
Provided is a semiconductor device including a semiconductor layer in which a plurality of pixels each including a photoelectric converter is provided, and an interconnection structure arranged over the semiconductor layer. The plurality of pixels includes a first light-receiving pixel and a second light-receiving pixel, the interconnection structure includes a first insulating film made of a first insulating material, a first insulating member arranged in association with the first light-receiving pixel and made of a second insulating material having a larger hydrogen content than the first insulating material, and a second insulating member arranged in association with the second light-receiving pixel and made of the second insulating material, and a volume of the first insulating member is larger than a volume of the second insulating member.
公开/授权文献
- US20210028203A1 SEMICONDUCTOR DEVICE AND EQUIPMENT 公开/授权日:2021-01-28
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