- 专利标题： Droplet measurement method, droplet measurement apparatus, and method of manufacturing display device
-
申请号： US16820149申请日： 2020-03-16
-
公开(公告)号： US11417572B2公开(公告)日： 2022-08-16
- 发明人: Jongsung Kim , Honggi Min
- 申请人： SAMSUNG DISPLAY CO., LTD.
- 申请人地址： KR Yongin-si
- 专利权人： SAMSUNG DISPLAY CO., LTD.
- 当前专利权人： SAMSUNG DISPLAY CO., LTD.
- 当前专利权人地址： KR Yongin-si
- 代理机构： F. Chau & Associates, LLC
- 优先权： KR10-2019-0099271 20190814
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; H01L51/00 ; H01L51/56
摘要：
A droplet measurement method is described. The droplet measurement method may include discharging a droplet on a substrate, scanning the droplet by moving a scanning unit, and calculating a volume of the droplet by using the thicknesses of the portions of the droplet. The scanning unit may include optical scanners arranged in multiple directions, storing thicknesses of portions of the droplet scanned by the scanning unit.
公开/授权文献
信息查询
IPC分类:
