- 专利标题: Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same
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申请号: US16767689申请日: 2018-11-09
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公开(公告)号: US11417491B2公开(公告)日: 2022-08-16
- 发明人: Jie Tang , Jinshi Yuan , Luchang Qin
- 申请人: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- 申请人地址: JP Tsukuba
- 专利权人: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- 当前专利权人: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- 当前专利权人地址: JP Tsukuba
- 代理机构: Morgan, Lewis & Bockius LLP
- 优先权: JPJP2017-228505 20171129
- 国际申请: PCT/JP2018/041601 WO 20181109
- 国际公布: WO2019/107113 WO 20190606
- 主分类号: H01J9/02
- IPC分类号: H01J9/02 ; H01J1/304 ; C01B32/914 ; B82Y30/00 ; B82Y40/00
摘要:
The purpose of the present invention is to provide an emitter that is made of hafnium carbide (HfC) and that releases electrons in a stable and highly efficient manner, a method for manufacturing the emitter, and an electron gun and electronic device in which the emitter is used. In this nanowire equipped emitter, the nanowires are made of hafnium carbide (HfC) single crystal, the longitudinal direction of the nanowires match the crystal direction of the hafnium carbide single crystal, and the end part of the nanowires through which electrons are to be released comprise the (200) face and the {310} face of the hafnium carbide single crystal, with the (200) face being the center and the {311} faces surrounding the (200) face.
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