- 专利标题: Methods and systems for fabricating high quality superconducting tapes
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申请号: US16930529申请日: 2020-07-16
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公开(公告)号: US11417444B2公开(公告)日: 2022-08-16
- 发明人: Goran Majkic , Venkat Selvamanickam
- 申请人: The University of Houston System
- 申请人地址: US TX Houston
- 专利权人: The University of Houston System
- 当前专利权人: The University of Houston System
- 当前专利权人地址: US TX Houston
- 代理机构: Blank Rome LLP
- 代理商 Matthew J. Esserman
- 主分类号: H01B12/06
- IPC分类号: H01B12/06 ; H01B13/00 ; C23C16/02 ; H01L39/24 ; C23C16/40 ; C23C16/54 ; C23C16/448 ; H01B13/008
摘要:
An MOCVD system fabricates high quality superconductor tapes with variable thicknesses. The MOCVD system can include a gas flow chamber between two parallel channels in a housing. A substrate tape is heated and then passed through the MOCVD housing such that the gas flow is perpendicular to the tape's surface. Precursors are injected into the gas flow for deposition on the substrate tape. In this way, superconductor tapes can be fabricated with variable thicknesses, uniform precursor deposition, and high critical current densities.
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