- 专利标题: Method for functionalising a substrate
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申请号: US16469897申请日: 2017-12-07
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公开(公告)号: US11415881B2公开(公告)日: 2022-08-16
- 发明人: Stefan Landis , Raluca Tiron
- 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Pillsbury Winthrop Shaw Pittman LLP
- 优先权: FR1662677 20161216
- 国际申请: PCT/EP2017/081908 WO 20171207
- 国际公布: WO2018/108708 WO 20180621
- 主分类号: G03F7/00
- IPC分类号: G03F7/00
摘要:
A method for functionalising a substrate intended for the self-assembly of a block copolymer, includes depositing on the surface of a substrate a layer of a first polymer material, the first polymer having a first chemical affinity with respect to the block copolymer; grafting one part only of the first polymer material layer onto the surface of the substrate; printing, using a mould, patterns in a sacrificial layer arranged above the grafted part of the first polymer material layer; transferring the patterns of the sacrificial layer into the grafted part of the first polymer material layer, until the substrate is reached; and removing at least one part of the sacrificial layer by wet etching, so as to uncover the grafted part of the first polymer material layer.
公开/授权文献
- US20190317400A1 METHOD FOR FUNCTIONALISING A SUBSTRATE 公开/授权日:2019-10-17
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