Invention Grant
- Patent Title: Vapor deposition apparatus
-
Application No.: US16271189Application Date: 2019-02-08
-
Publication No.: US11408072B2Publication Date: 2022-08-09
- Inventor: Jin-Kwang Kim , Seung-Yong Song , Myung-Soo Huh , Suk-Won Jung , Choel-Min Jang , Jae-Hyun Kim , Sung-Chul Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Cantor Colburn LLP
- Priority: KR10-2013-0088266 20130725
- Main IPC: C23C16/455
- IPC: C23C16/455

Abstract:
A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.
Public/Granted literature
- US20190169747A1 VAPOR DEPOSITION APPARATUS Public/Granted day:2019-06-06
Information query
IPC分类: