- 专利标题： Carrier device, work processing apparatus, control method of carrier device and storage medium storing program
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申请号： US16842974申请日： 2020-04-08
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公开(公告)号： US11380559B2公开(公告)日： 2022-07-05
- 发明人: Yohei Eto , Junji Kunisawa , Teruaki Hombo , Keiji Kanazawa
- 申请人： EBARA CORPORATION , HIRATA CORPORATION
- 申请人地址： JP Tokyo; JP Kumamoto
- 专利权人： EBARA CORPORATION,HIRATA CORPORATION
- 当前专利权人： EBARA CORPORATION,HIRATA CORPORATION
- 当前专利权人地址： JP Tokyo; JP Kumamoto
- 代理机构： Pearne & Gordon LLP
- 优先权： JPJP2019-074397 20190409
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/677 ; H01L21/687
摘要：
An object is to suppress dew condensation in a carrier device. There is provided a carrier device comprising a body; a rotational part provided to be rotatable relative to the body; an arm supported on the rotational part; an end effector provided in a leading end portion of the arm and configured to hold a work; a gas supply unit configured to supply a gas to an arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm; and an exhaust unit provided in a body-side internal space that communicates with the arm-side internal space and configured to discharge the gas in the arm-side internal space and/or in the body-side internal space.
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