Invention Grant
- Patent Title: Virtual bulk in semiconductor on insulator technology
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Application No.: US16784813Application Date: 2020-02-07
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Publication No.: US11374092B2Publication Date: 2022-06-28
- Inventor: John J. Pekarik , Vibhor Jain , Herbert Ho , Claude Ortolland , Qizhi Liu
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/165 ; H01L29/737 ; H01L29/66
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to virtual bulk in semiconductor on insulator technology and methods of manufacture. The structure includes a heterojunction bipolar transistor formed on a semiconductor on insulator (SOI) wafer with a doped sub-collector material in a buried insulator region under a semiconductor substrate of the SOI wafer.
Public/Granted literature
- US20210091180A1 VIRTUAL BULK IN SEMICONDUCTOR ON INSULATOR TECHNOLOGY Public/Granted day:2021-03-25
Information query
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