- 专利标题: Surface characteristic inspection apparatus and surface characteristic inspection program
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申请号: US16767452申请日: 2018-12-14
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公开(公告)号: US11353322B2公开(公告)日: 2022-06-07
- 发明人: Eiichi Nagaoka
- 申请人: HORIBA, Ltd.
- 申请人地址: JP Kyoto
- 专利权人: HORIBA, Ltd.
- 当前专利权人: HORIBA, Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Alleman Hall Creasman & Tuttle LLP
- 优先权: JPJP2017-240832 20171215
- 国际申请: PCT/JP2018/046161 WO 20181214
- 国际公布: WO2019/117301 WO 20190620
- 主分类号: G01B11/30
- IPC分类号: G01B11/30 ; G01B11/00 ; G01B11/24 ; G01N21/55
摘要:
The present invention is intended to make it easier to perform positioning of a detection device when detecting surface characteristics of a sensing object. The invention includes a detection device, a processing part, a guidance information generation part and an informing part. The detection device detects reflection light from a sensing object by irradiating light onto the sensing object. The processing part calculates surface characteristics of the sensing object by processing data from the detection device. The guidance information generation part generates information about a distance and/or an attitude of the detection device relative to the sensing object. The informing part informs the information about the distance and/or the attitude generated by the guidance information generation part.
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