Invention Grant
- Patent Title: Semiconductor device, microphone and methods for forming a semiconductor device
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Application No.: US17024029Application Date: 2020-09-17
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Publication No.: US11352253B2Publication Date: 2022-06-07
- Inventor: Markus Kahn , Anna-Katharina Kaiser , Soenke Pirk , Juergen Steinbrenner , Julia-Magdalena Straeussnigg
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102017103620.2 20170222
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H04R31/00 ; H04R19/00 ; H04R19/04

Abstract:
A semiconductor device comprises a structured metal layer. The structured metal layer lies above a semiconductor substrate. In addition, a thickness of the structured metal layer is more than 100 nm. Furthermore, the semiconductor device comprises a covering layer. The covering layer lies adjacent to at least one part of a front side of the structured metal layer and adjacent to a side wall of the structured metal layer. In addition, the covering layer comprises amorphous silicon carbide.
Public/Granted literature
- US20210002132A1 Semiconductor Device, Microphone and Methods for Forming a Semiconductor Device Public/Granted day:2021-01-07
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