Invention Grant
- Patent Title: Display panel, evaporation method of luminous material and equipment
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Application No.: US16349611Application Date: 2019-03-05
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Publication No.: US11349076B2Publication Date: 2022-05-31
- Inventor: Wei Cheng
- Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Wuhan
- Priority: CN201811207832.5 20181017
- International Application: PCT/CN2019/076912 WO 20190305
- International Announcement: WO2020/077935 WO 20200423
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/56 ; C23C14/04 ; H01L51/50 ; H01L21/02 ; C23C14/32 ; H01L27/32 ; H01L21/285

Abstract:
A display panel, an evaporation method of a luminous material, and an equipment are provided. The method is performed by providing an electric field covering an array substrate, and generating luminous material charged particles. After the luminous material charged particles passing through the mask, they will change a direction of motion under an action of the electric field, and move perpendicularly to a pixel area of the array substrate along a direction of the electric field, and then uniformly deposit on the pixel area of the array substrate, which ensures that a uniformity of film formation of the luminous material.
Public/Granted literature
- US20200287139A1 DISPLAY PANEL, EVAPORATION METHOD OF LUMINOUS MATERIAL AND EQUIPMENT Public/Granted day:2020-09-10
Information query
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