- 专利标题： Ejection-material ejection device, information processing apparatus, and control method of ejection-material ejection device
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申请号： US16847871申请日： 2020-04-14
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公开(公告)号： US11333972B2公开(公告)日： 2022-05-17
- 发明人: Hisashi Namba , Noriyasu Hasegawa , Ken Katsuta , Nobuto Kawahara , Hideki Matsumoto
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 代理机构： Venable LLP
- 优先权： JPJP2019-083711 20190425
- 主分类号： B41J2/14
- IPC分类号： B41J2/14 ; B41J2/175 ; G03F7/00 ; B41J29/38
摘要：
An ejection device is used for an imprint apparatus that presses a mold against an ejection material ejected onto a substrate to form a pattern. The ejection device includes: a housing unit having an ejection head configured to eject the ejection material onto the substrate, and housing configured to accommodate the ejection material; and a control unit configured to control processing of the ejection device. The control unit switches the processing according to a usage status of a consumable part included in the housing unit.
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