- 专利标题: Omni-directional conditioner device
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申请号: US16281730申请日: 2019-02-21
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公开(公告)号: US11331770B2公开(公告)日: 2022-05-17
- 发明人: Dongliang Daniel Sheu , Yi-Hung Lin
- 申请人: National Tsing Hua University
- 申请人地址: TW Hsinchu
- 专利权人: National Tsing Hua University
- 当前专利权人: National Tsing Hua University
- 当前专利权人地址: TW Hsinchu
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: TW107118643 20180531
- 主分类号: B24B53/017
- IPC分类号: B24B53/017 ; H01L21/321 ; H01L21/304 ; B24B37/04
摘要:
An omni-directional conditioner device includes a carrier that includes a holding part for holding and rotating an object for polishing purpose; a conditioner disposed around the carrier; and a transmission mechanism connected with the carrier on one side and the conditioner on the other side, the transmission mechanism including at least one directional adjustment unit that controls the rotational direction of the conditioner. When the directional adjustment unit is set in one position, the carrier and the conditioner rotate in a same direction, and when the directional adjustment unit is set in another position, the carrier and the conditioner rotate in opposite directions.
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