- 专利标题: Sputter ion pump with penning-trap current sensor
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申请号: US16828128申请日: 2020-03-24
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公开(公告)号: US11289315B1公开(公告)日: 2022-03-29
- 发明人: Steven Michael Hughes , Farhad Majdeteimouri
- 申请人: ColdQuanta, Inc.
- 申请人地址: US CO Boulder
- 专利权人: ColdQuanta, Inc.
- 当前专利权人: ColdQuanta, Inc.
- 当前专利权人地址: US CO Boulder
- 代理机构: Van Pelt, Yi & James LLP
- 代理商 Clifton Leon Anderson
- 主分类号: H01J41/12
- IPC分类号: H01J41/12 ; G05B19/04 ; G05B19/048 ; H01J27/04
摘要:
A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.
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