- 专利标题: Thin film transistor, array substrate, display apparatus, and method of fabricating thin film transistor
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申请号: US15768297申请日: 2017-08-24
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公开(公告)号: US11244970B2公开(公告)日: 2022-02-08
- 发明人: Zhonghao Huang , Yongliang Zhao , Jun Wang , Yutong Yang , Jianfei Shi , Baosheng He , Xu Wu
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , Chongqing BOE Optoelectronics Technology Co., Ltd.
- 申请人地址: CN Beijing; CN Chongqing
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.,Chongqing BOE Optoelectronics Technology Co., Ltd.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.,Chongqing BOE Optoelectronics Technology Co., Ltd.
- 当前专利权人地址: CN Beijing; CN Chongqing
- 代理机构: Intellectual Valley Law, P.C.
- 优先权: CN201710334008.5 20170512
- 国际申请: PCT/CN2017/098827 WO 20170824
- 国际公布: WO2018/205450 WO 20181115
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L27/12 ; H01L29/66 ; H01L29/786 ; H01L21/768 ; H01L21/027 ; H01L21/441 ; H01L21/84
摘要:
The present application discloses a thin film transistor. The thin film transistor includes a base substrate; an active layer; an etch stop layer on a side of the active layer distal to the base substrate; and a source electrode and a drain electrode on a side of the etch stop layer distal to the active layer. The active layer includes a channel region, a source electrode contact region, and a drain electrode contact region. An orthographic projection of the etch stop layer on the base substrate surrounds an orthographic projection of the drain electrode contact region on the base substrate. An orthographic projection of the source electrode contact region on the base substrate at least partially peripherally surrounding the orthographic projection of the etch stop layer on the base substrate.
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