- 专利标题: Method and device for reducing metal burrs when sawing semiconductor packages
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申请号: US16181619申请日: 2018-11-06
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公开(公告)号: US11244908B2公开(公告)日: 2022-02-08
- 发明人: HunTeak Lee , Deokkyung Yang , HeeSoo Lee
- 申请人: STATS ChipPAC Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkin and Associates, P.C.
- 代理商 Brian M. Kaufman; Robert D. Atkins
- 主分类号: H01L23/552
- IPC分类号: H01L23/552 ; H01L23/31 ; H01L21/56 ; H01L23/00 ; H01L21/78
摘要:
A semiconductor device has a substrate. A conductive layer is formed over the substrate and includes a ground plane. A first tab of the conductive layer extends from the ground plane and less than half-way across a saw street of the substrate. A shape of the first tab can include elliptical, triangular, parallelogram, or rectangular portions, or any combination thereof. An encapsulant is deposited over the substrate. The encapsulant and substrate are singulated through the saw street. An electromagnetic interference (EMI) shielding layer is formed over the encapsulant. The EMI shielding layer contacts the first tab of the conductive layer.
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