- 专利标题: Die ejectors and die supplying apparatuses including ihe same
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申请号: US16366152申请日: 2019-03-27
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公开(公告)号: US11244840B2公开(公告)日: 2022-02-08
- 发明人: Bub-ryong Lee , Jung-lae Jung , Sung-hyeon Park
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2018-0118495 20181004
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/683
摘要:
A die ejector includes a supporter configured to support a film on which a die is attached in a vertical direction, an elevation device in a hole of the supporter and configured to move the film with the die attached thereon in the vertical direction and in relation to the supporter, a driver configured to move the elevation device in the vertical direction, an air conduit guide in an enclosure region at least partially defined by an inner surface of the elevation device and having an inner surface defining an air flow conduit, a pressure adjuster device configured to induce air flow through the air flow conduit based on inducing a pressure gradient between the air flow conduit and the pressure adjuster device, and a flow guide in the air flow conduit and configured to control a flow of air through at least a portion of the air flow conduit.
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