• 专利标题: Method for transferring a layer by using a detachable structure
  • 申请号: US16769976
    申请日: 2018-11-21
  • 公开(公告)号: US11222824B2
    公开(公告)日: 2022-01-11
  • 发明人: Michel Bruel
  • 申请人: Soitec
  • 申请人地址: FR Bernin
  • 专利权人: Soitec
  • 当前专利权人: Soitec
  • 当前专利权人地址: FR Bernin
  • 代理机构: TraskBritt
  • 优先权: FR1761759 20171207
  • 国际申请: PCT/FR2018/052939 WO 20181121
  • 国际公布: WO2019/110886 WO 20190613
  • 主分类号: H01L21/78
  • IPC分类号: H01L21/78 H01L21/304
Method for transferring a layer by using a detachable structure
摘要:
A method for transferring a superficial layer from a detachable structure comprises the following steps: a) supplying the detachable structure comprising: •a support substrate, •a detachable layer arranged on the support substrate along a main plane and comprising a plurality of walls that are separated from one another, each wall having at least one side that is perpendicular to the main plane; •a superficial layer arranged on the detachable layer along the main plane; b) applying a mechanical force configured to cause said walls to bend, along a direction that is secant to said side, until causing the mechanical rupture of the walls, in order to detach the superficial layer from the support substrate.
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