- 专利标题: Method for transferring a layer by using a detachable structure
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申请号: US16769976申请日: 2018-11-21
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公开(公告)号: US11222824B2公开(公告)日: 2022-01-11
- 发明人: Michel Bruel
- 申请人: Soitec
- 申请人地址: FR Bernin
- 专利权人: Soitec
- 当前专利权人: Soitec
- 当前专利权人地址: FR Bernin
- 代理机构: TraskBritt
- 优先权: FR1761759 20171207
- 国际申请: PCT/FR2018/052939 WO 20181121
- 国际公布: WO2019/110886 WO 20190613
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; H01L21/304
摘要:
A method for transferring a superficial layer from a detachable structure comprises the following steps: a) supplying the detachable structure comprising: •a support substrate, •a detachable layer arranged on the support substrate along a main plane and comprising a plurality of walls that are separated from one another, each wall having at least one side that is perpendicular to the main plane; •a superficial layer arranged on the detachable layer along the main plane; b) applying a mechanical force configured to cause said walls to bend, along a direction that is secant to said side, until causing the mechanical rupture of the walls, in order to detach the superficial layer from the support substrate.
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