发明授权
- 专利标题: Sensing sensor
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申请号: US16978775申请日: 2019-03-06
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公开(公告)号: US11181509B2公开(公告)日: 2021-11-23
- 发明人: Hiroyuki Kukita , Tsuyoshi Shiobara
- 申请人: NIHON DEMPA KOGYO CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人: NIHON DEMPA KOGYO CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: JCIPRNET
- 优先权: JPJP2018-043359 20180309
- 国际申请: PCT/JP2019/008897 WO 20190306
- 国际公布: WO2019/172323 WO 20190912
- 主分类号: G01N29/32
- IPC分类号: G01N29/32 ; G01N29/036 ; G01N33/00
摘要:
To provide a technique for expanding a measurement dynamic range and performing a stable detection in a sensing sensor using a crystal resonator. A spacer is disposed between an oscillator circuit that oscillates a crystal resonator and a base body that cools an oscillator circuit to a cryogenic temperature, and an oscillator circuit board includes a heater resistor that heats the oscillator circuit. Therefore, the temperature of the oscillator circuit that does not fall below a functional limit temperature and is a low temperature as much as possible can be provided. A negative resistance of the oscillator circuit can be increased, the measurement dynamic range can be expanded, and the crystal resonator can be stably oscillated.
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