Invention Grant
- Patent Title: Particle traps and barriers for particle suppression
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Application No.: US16633419Application Date: 2018-07-18
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Publication No.: US11175596B2Publication Date: 2021-11-16
- Inventor: Han-Kwang Nienhuys , Ronald Peter Albright , Jacob Brinkert , Yang-Shan Huang , Hendrikus Gijsbertus Schimmel , Antonie Hendrik Verweij
- Applicant: ASML Netherlands B.V. , ASML Holding N.V.
- Applicant Address: NL Veldhoven; NL Veldhoven
- Assignee: ASML Netherlands B.V.,ASML Holding N.V.
- Current Assignee: ASML Netherlands B.V.,ASML Holding N.V.
- Current Assignee Address: NL Veldhoven; NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2018/069463 WO 20180718
- International Announcement: WO2019/020445 WO 20190131
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B01D45/08 ; B01D45/10
![Particle traps and barriers for particle suppression](/abs-image/US/2021/11/16/US11175596B2/abs.jpg.150x150.jpg)
Abstract:
Designs are provided to reduce the possibility of contaminant particles with a large range of sizes, materials, travel speeds and angles of incidence reaching a particle-sensitive environment. According to an aspect of the disclosure, there is provided an object stage comprising first and second chambers, a first structure having a first surface, and a second structure. The second structure is configured to support an object in the second chamber, movable relative to the first structure. The second structure comprises a second surface opposing the first surface of the first structure thereby defining a gap between the first structure and the second structure that extends between the first chamber and the second chamber. The second structure further comprises a third surface within the first chamber. The object stage further comprises a trap disposed on at least a portion of the third surface, the trap comprising a plurality of baffles.
Public/Granted literature
- US20200225591A1 Particle Traps and Barriers for Particle Suppression Public/Granted day:2020-07-16
Information query
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