- 专利标题： MEMS microphone with improved particle filter
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申请号： US16630050申请日： 2018-07-03
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公开(公告)号： US11128959B2公开(公告)日： 2021-09-21
- 发明人: Pirmin Hermann Otto Rombach , Dennis Mortensen , Jan Tue Ravnkilde , Kurt Rasmussen , Morten Ginnerup
- 申请人： TDK Corporation
- 申请人地址： JP Tokyo
- 专利权人： TDK Corporation
- 当前专利权人： TDK Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Nixon Peabody LLP
- 优先权： DE102017115405.1 20170710
- 国际申请： PCT/EP2018/067942 WO 20180703
- 国际公布： WO2019/011720 WO 20190117
- 主分类号： H04R9/08
- IPC分类号： H04R9/08 ; H04R11/04 ; H04R17/02 ; H04R19/04 ; H04R21/02 ; B81B7/00 ; H04R1/04
摘要：
A MEMS microphone including a carrier board and a MEMS chip mounted thereon over a sound opening. A filter chip includes a bulk material with an aperture covered and closed by a mesh. The mesh includes a layer of the filter chip with parallel through-going first holes structured in the layer. The filter chip is arranged in or on the carrier board such that the mesh covers the sound opening.
公开/授权文献
- US20200169818A1 MEMS MICROPHONE WITH IMPROVED PARTICLE FILTER 公开/授权日：2020-05-28
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