- 专利标题: Microelectromechanical microphone
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申请号: US16235927申请日: 2018-12-28
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公开(公告)号: US11032629B2公开(公告)日: 2021-06-08
- 发明人: Roberto Brioschi , Paul Anthony Barbara
- 申请人: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS (MALTA) LTD
- 申请人地址: IT Agrate Brianza; MT Kirkop
- 专利权人: STMICROELECTRONICS S.R.L.,STMICROELECTRONICS (MALTA) LTD
- 当前专利权人: STMICROELECTRONICS S.R.L.,STMICROELECTRONICS (MALTA) LTD
- 当前专利权人地址: IT Agrate Brianza; MT Kirkop
- 代理机构: Seed Intellectual Property Law Group LLP
- 优先权: IT10201529270 20150630,IT10201556964 20150930,IT10201584541 20151217
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H04R1/04 ; B81B7/00 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; H04R1/06
摘要:
A microelectromechanical microphone includes: a substrate; a sensor chip, integrating a microelectromechanical electroacoustic transducer; and a control chip operatively coupled to the sensor chip. In one embodiment, the sensor chip and the control chip are bonded to the substrate, and the sensor chip overlies, or at least partially overlies, the control chip. In another embodiment, the sensor is bonded to the substrate and a barrier is located around at least a portion of the sensor chip.
公开/授权文献
- US20190141426A1 MICROELECTROMECHANICAL MICROPHONE 公开/授权日:2019-05-09
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